Attogram mass sensing based on silicon microbeam resonators

Using doubly-clamped silicon (Si) microbeam resonators, we demonstrate sub-attogram per Hertz (ag/Hz) mass sensitivity, which is extremely high sensitivity achieved by micro-scale MEMS mass sensors. We also characterize unusual buckling phenomena of the resonators. The thin-film based resonator is c...

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Vydáno v:Sci Rep
Hlavní autoři: Baek, In-Bok, Byun, Sangwon, Lee, Bong Kuk, Ryu, Jin-Hwa, Kim, Yarkyeon, Yoon, Yong Sun, Jang, Won Ik, Lee, Seongjae, Yu, Han Young
Médium: Artigo
Jazyk:Inglês
Vydáno: Nature Publishing Group 2017
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Article
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5399360/
https://ncbi.nlm.nih.gov/pubmed/28429793
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep46660
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