Fabrication and Gas-Sensing Properties of Ni-Silicide/Si Nanowires

Ni-silicide/Si nanowires were fabricated by atomic force microscope nano-oxidation on silicon-on-insulator substrates, selective wet etching, and reactive deposition epitaxy. Ni-silicide nanocrystal-modified Si nanowire and Ni-silicide/Si heterostructure multi-stacked nanowire were formed by low- an...

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Bibliographic Details
Published in:Nanoscale Res Lett
Main Authors: Hsu, Hsun-Feng, Chen, Chun-An, Liu, Shang-Wu, Tang, Chun-Kai
Format: Artigo
Language:Inglês
Published: Springer US 2017
Subjects:
Nano Express
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC5344872/
https://ncbi.nlm.nih.gov/pubmed/28282978
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-1955-6
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