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Fabrication and Gas-Sensing Properties of Ni-Silicide/Si Nanowires
Ni-silicide/Si nanowires were fabricated by atomic force microscope nano-oxidation on silicon-on-insulator substrates, selective wet etching, and reactive deposition epitaxy. Ni-silicide nanocrystal-modified Si nanowire and Ni-silicide/Si heterostructure multi-stacked nanowire were formed by low- an...
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| Publicado no: | Nanoscale Res Lett |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer US
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5344872/ https://ncbi.nlm.nih.gov/pubmed/28282978 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-1955-6 |
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