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Effect of Intrinsic Stress on Structural and Optical Properties of Amorphous Si-Doped SnO(2) Thin-Film
The effect of intrinsic stress on the structure and physical properties of silicon-tin-oxide (STO) films have been investigated. Since a state of tensile stress is available in as-deposited films, the value of stress can be exponentially enhanced when the annealing temperature is increased. The tens...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5344632/ https://ncbi.nlm.nih.gov/pubmed/28772385 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma10010024 |
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