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Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor
Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal struc...
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| Publicado en: | Sensors (Basel) |
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| Autores principales: | , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5335975/ https://ncbi.nlm.nih.gov/pubmed/28134854 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17020257 |
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