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High quality AlN epilayers grown on nitrided sapphire by metal organic chemical vapor deposition

Influence of sapphire pretreatment conditions on crystalline quality of AlN epilayers has been investigated by metal organic chemical vapor deposition (MOCVD). Compared to alumination treatment, it is found that appropriate sapphire nitridation significantly straightens the surface atomic terraces a...

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Detalles Bibliográficos
Publicado en:Sci Rep
Main Authors: Wang, Jiaming, Xu, Fujun, He, Chenguang, Zhang, Lisheng, Lu, Lin, Wang, Xinqiang, Qin, Zhixin, Shen, Bo
Formato: Artigo
Idioma:Inglês
Publicado: Nature Publishing Group 2017
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Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC5318880/
https://ncbi.nlm.nih.gov/pubmed/28220829
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep42747
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