High quality AlN epilayers grown on nitrided sapphire by metal organic chemical vapor deposition

Influence of sapphire pretreatment conditions on crystalline quality of AlN epilayers has been investigated by metal organic chemical vapor deposition (MOCVD). Compared to alumination treatment, it is found that appropriate sapphire nitridation significantly straightens the surface atomic terraces a...

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Bibliografske podrobnosti
izdano v:Sci Rep
Main Authors: Wang, Jiaming, Xu, Fujun, He, Chenguang, Zhang, Lisheng, Lu, Lin, Wang, Xinqiang, Qin, Zhixin, Shen, Bo
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group 2017
Teme:
Article
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC5318880/
https://ncbi.nlm.nih.gov/pubmed/28220829
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep42747
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