Cargando...
High quality AlN epilayers grown on nitrided sapphire by metal organic chemical vapor deposition
Influence of sapphire pretreatment conditions on crystalline quality of AlN epilayers has been investigated by metal organic chemical vapor deposition (MOCVD). Compared to alumination treatment, it is found that appropriate sapphire nitridation significantly straightens the surface atomic terraces a...
Gardado en:
| Publicado en: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Nature Publishing Group
2017
|
| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5318880/ https://ncbi.nlm.nih.gov/pubmed/28220829 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep42747 |
| Tags: |
Engadir etiqueta
Sen Etiquetas, Sexa o primeiro en etiquetar este rexistro!
|