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Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications
In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating ele...
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| Publicado en: | Sensors (Basel) |
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| Autores principales: | , , , , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5298635/ https://ncbi.nlm.nih.gov/pubmed/28042839 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17010062 |
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