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Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications
In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating ele...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5298635/ https://ncbi.nlm.nih.gov/pubmed/28042839 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17010062 |
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