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Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate

In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering. The effect of O(2)/Ar gas flow ratio during channel deposition on the electrical p...

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Pubblicato in:Sci Rep
Autori principali: Han, Dedong, Zhang, Yi, Cong, Yingying, Yu, Wen, Zhang, Xing, Wang, Yi
Natura: Artigo
Lingua:Inglês
Pubblicazione: Nature Publishing Group 2016
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC5150528/
https://ncbi.nlm.nih.gov/pubmed/27941915
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep38984
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