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Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate
In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering. The effect of O(2)/Ar gas flow ratio during channel deposition on the electrical p...
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| 發表在: | Sci Rep |
|---|---|
| Main Authors: | , , , , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Nature Publishing Group
2016
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5150528/ https://ncbi.nlm.nih.gov/pubmed/27941915 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep38984 |
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