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Effect of magnetron sputtering parameters and stress state of W film precursors on WSe(2) layer texture by rapid selenization
Tungsten diselenide (WSe(2)) film was obtained by rapid selenization of magnetron sputtered tungsten (W) film. To prevent WSe(2) film peeling off from the substrate during selenization, the W film was designed with a double-layer structure. The first layer was deposited at a high sputtering-gas pres...
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| Gepubliceerd in: | Sci Rep |
|---|---|
| Hoofdauteurs: | , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Nature Publishing Group
2016
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5095554/ https://ncbi.nlm.nih.gov/pubmed/27812031 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep36451 |
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