טוען...
Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200 °C
The fatigue properties of ultrathin protective coatings on silicon thin films were investigated. The cohesive and delamination fatigue properties of 22 nm-thick atomic-layered-deposited (ALD) titania were characterized and compared to that of 25 nm-thick alumina. Both coatings were deposited at 200...
שמור ב:
| הוצא לאור ב: | Sci Technol Adv Mater |
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| Main Authors: | , , , |
| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
Taylor & Francis
2014
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| נושאים: | |
| גישה מקוונת: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5090606/ https://ncbi.nlm.nih.gov/pubmed/27877645 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/15/1/015003 |
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