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Silica based polishing of {100} and {111} single crystal diamond
Diamond is one of the hardest and most difficult to polish materials. In this paper, the polishing of {111} and {100} single crystal diamond surfaces by standard chemical mechanical polishing, as used in the silicon industry, is demonstrated. A Logitech Tribo Chemical Mechanical Polishing system wit...
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| Publicado no: | Sci Technol Adv Mater |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Taylor & Francis
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5090534/ https://ncbi.nlm.nih.gov/pubmed/27877689 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/15/3/035013 |
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