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3D heterostructures and systems for novel MEMS/NEMS

In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices...

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Bibliografiske detaljer
Udgivet i:Sci Technol Adv Mater
Main Authors: Yakovlevich Prinz, Victor, Alexandrovich Seleznev, Vladimir, Victorovich Prinz, Alexander, Vladimirovich Kopylov, Alexander
Format: Artigo
Sprog:Inglês
Udgivet: Taylor & Francis 2009
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5090422/
https://ncbi.nlm.nih.gov/pubmed/27877295
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/10/3/034502
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