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3D heterostructures and systems for novel MEMS/NEMS
In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices...
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| Publicado no: | Sci Technol Adv Mater |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Taylor & Francis
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5090422/ https://ncbi.nlm.nih.gov/pubmed/27877295 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/10/3/034502 |
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