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Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors
Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS re...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5087478/ https://ncbi.nlm.nih.gov/pubmed/27754377 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16101690 |
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