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Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests

This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process. The size of the accelerometer is 1.5 × 1.5 mm(2), thus fitting the 1.8 × 1.8 mm(2...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Kim, Hyun Chan, Song, Sangho, Kim, Jaehwan
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5038772/
https://ncbi.nlm.nih.gov/pubmed/27649184
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16091499
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