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High speed e-beam writing for large area photonic nanostructures — a choice of parameters
Photonic nanostructures are used for many optical systems and applications. However, some high-end applications require the use of electron-beam lithography (EBL) to generate such nanostructures. An important technological bottleneck is the exposure time of the EBL systems, which can exceed 24 hours...
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| Publicado no: | Sci Rep |
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| Main Authors: | , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5025733/ https://ncbi.nlm.nih.gov/pubmed/27633902 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep32945 |
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