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Catalytic Effects of Cr on Nitridation of Silicon and Formation of One-dimensional Silicon Nitride Nanostructure

The catalytic effects of chromium (Cr) on the direct nitridation of silicon (Si) and morphology of nitridation product were investigated. Cr dramatically improved the conversation of Si to silicon nitride (Si(3)N(4)). The complete conversion was achieved at 1350 °C upon addition of 1.25 wt% Cr. This...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Liang, Feng, Lu, Lilin, Tian, Liang, Li, Faliang, Zhang, Haijun, Zhang, Shaowei
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4985709/
https://ncbi.nlm.nih.gov/pubmed/27527681
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep31559
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