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Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings
Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabricati...
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| Publicado en: | Sensors (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2016
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4970126/ https://ncbi.nlm.nih.gov/pubmed/27420070 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16071080 |
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