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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Synchrotron radiation micro-tomography (SRµT) is a non-destructive three-dimensional (3D) imaging technique that offers high flux for fast data acquisition times with high spatial resolution. In the electronics industry there is serious interest in performing failure analysis on 3D microelectronic p...

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Detalhes bibliográficos
Publicado no:J Vis Exp
Main Authors: Carlton, Holly D., Elmer, John W., Li, Yan, Pacheco, Mario, Goyal, Deepak, Parkinson, Dilworth Y., MacDowell, Alastair A.
Formato: Artigo
Idioma:Inglês
Publicado em: MyJove Corporation 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4941932/
https://ncbi.nlm.nih.gov/pubmed/27167469
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/53683
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