Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Synchrotron radiation micro-tomography (SRµT) is a non-destructive three-dimensional (3D) imaging technique that offers high flux for fast data acquisition times with high spatial resolution. In the electronics industry there is serious interest in performing failure analysis on 3D microelectronic p...

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Dades bibliogràfiques
Publicat a:J Vis Exp
Autors principals: Carlton, Holly D., Elmer, John W., Li, Yan, Pacheco, Mario, Goyal, Deepak, Parkinson, Dilworth Y., MacDowell, Alastair A.
Format: Artigo
Idioma:Inglês
Publicat: MyJove Corporation 2016
Matèries:
Engineering
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC4941932/
https://ncbi.nlm.nih.gov/pubmed/27167469
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/53683
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