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Optical Calibration of a Submicrometer Magnification Standard
The calibration of a new submicrometer magnification standard for electron microscopes is described. The new standard is based on the width of a thin thermal-oxide film sandwiched between a silicon single-crystal substrate and a polysilicon capping layer. The calibration is based on an ellipsometric...
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| Publicado no: | J Res Natl Inst Stand Technol |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1992
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4914234/ https://ncbi.nlm.nih.gov/pubmed/28053432 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.097.008 |
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