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Characterization of a self-calibrating, high-precision, stacked-stage, vertical dual-axis goniometer

We present details on the alignment and calibration of a goniometer assembly consisting two stacked, optically encoded, vertical axis rotation stages. A technique for its calibration is presented that utilizes a stable, uncalibrated, third stage to position a mirror in conjunction with a nulling aut...

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Publicat a:Metrologia
Autors principals: Mendenhall, Marcus H., Henins, Albert, Windover, Donald, Cline, James P.
Format: Artigo
Idioma:Inglês
Publicat: 2016
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Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC4911639/
https://ncbi.nlm.nih.gov/pubmed/27330224
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0026-1394/53/3/933
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