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Characterization of a self-calibrating, high-precision, stacked-stage, vertical dual-axis goniometer
We present details on the alignment and calibration of a goniometer assembly consisting two stacked, optically encoded, vertical axis rotation stages. A technique for its calibration is presented that utilizes a stable, uncalibrated, third stage to position a mirror in conjunction with a nulling aut...
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| Veröffentlicht in: | Metrologia |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2016
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4911639/ https://ncbi.nlm.nih.gov/pubmed/27330224 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0026-1394/53/3/933 |
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