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Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon
Spatially- and temporally-resolved measurements of optical emission intensities are presented from rf discharges in argon over a wide range of pressures (6.7 to 133 Pa) and applied rf voltages (75 to 200 V). Results of measurements of emission intensities are presented for both an atomic transition...
Gardado en:
| Publicado en: | J Res Natl Inst Stand Technol |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1993
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4909175/ https://ncbi.nlm.nih.gov/pubmed/28053464 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.098.012 |
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