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Self-aligned grating couplers on template-stripped metal pyramids via nanostencil lithography
We combine nanostencil lithography and template stripping to create self-aligned patterns about the apex of ultrasmooth metal pyramids with high throughput. Three-dimensional patterns such as spiral and asymmetric linear gratings, which can couple incident light into a hot spot at the tip, are prese...
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| Vydáno v: | Appl Phys Lett |
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| Hlavní autoři: | , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
AIP Publishing LLC
2016
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4884184/ https://ncbi.nlm.nih.gov/pubmed/27375296 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4951673 |
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