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Feature Adaptive Sampling for Scanning Electron Microscopy
A new method for the image acquisition in scanning electron microscopy (SEM) was introduced. The method used adaptively increased pixel-dwell times to improve the signal-to-noise ratio (SNR) in areas of high detail. In areas of low detail, the electron dose was reduced on a per pixel basis, and a-po...
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| Pubblicato in: | Sci Rep |
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| Autori principali: | , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Nature Publishing Group
2016
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4858653/ https://ncbi.nlm.nih.gov/pubmed/27150131 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep25350 |
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