Chargement en cours...
Experimental dynamic trapping of electrostatically actuated bistable micro-beams
We demonstrate dynamic snap-through from a primary to a secondary statically inaccessible stable configuration in single crystal silicon, curved, doubly clamped micromechanical beam structures. Nanoscale motion of the fabricated bistable micromechanical devices was transduced using a high speed came...
Enregistré dans:
| Publié dans: | Appl Phys Lett |
|---|---|
| Auteurs principaux: | , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2016
|
| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4850554/ https://ncbi.nlm.nih.gov/pubmed/27141103 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4941731 |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|