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Experimental dynamic trapping of electrostatically actuated bistable micro-beams
We demonstrate dynamic snap-through from a primary to a secondary statically inaccessible stable configuration in single crystal silicon, curved, doubly clamped micromechanical beam structures. Nanoscale motion of the fabricated bistable micromechanical devices was transduced using a high speed came...
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| Udgivet i: | Appl Phys Lett |
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| Main Authors: | , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
2016
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4850554/ https://ncbi.nlm.nih.gov/pubmed/27141103 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4941731 |
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