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Optimized 2D array of thin silicon pillars for efficient antireflective coatings in the visible spectrum

Light reflection occuring at the surface of silicon wafers is drastically diminished by etching square pillars of height 110 nm and width 140 nm separated by a 100 nm gap distance in a square lattice. The design of the nanostructure is optimized to widen the spectral tolerance of the antireflective...

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Dettagli Bibliografici
Pubblicato in:Sci Rep
Autori principali: Proust, Julien, Fehrembach, Anne-Laure, Bedu, Frédéric, Ozerov, Igor, Bonod, Nicolas
Natura: Artigo
Lingua:Inglês
Pubblicazione: Nature Publishing Group 2016
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC4842965/
https://ncbi.nlm.nih.gov/pubmed/27109643
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep24947
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