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A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump

This paper presents a novel digital closed loop microelectromechanical system (MEMS) accelerometer with the architecture and experimental evaluation. The complicated timing diagram or complex power supply in published articles are circumvented by using a charge pump system of adjustable output volta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Sensors (Basel)
Hauptverfasser: Chu, Yixing, Dong, Jingxin, Chi, Baoyong, Liu, Yunfeng
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2016
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4813964/
https://ncbi.nlm.nih.gov/pubmed/26999157
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16030389
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