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A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump

This paper presents a novel digital closed loop microelectromechanical system (MEMS) accelerometer with the architecture and experimental evaluation. The complicated timing diagram or complex power supply in published articles are circumvented by using a charge pump system of adjustable output volta...

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Bibliografiska uppgifter
I publikationen:Sensors (Basel)
Huvudupphovsmän: Chu, Yixing, Dong, Jingxin, Chi, Baoyong, Liu, Yunfeng
Materialtyp: Artigo
Språk:Inglês
Publicerad: MDPI 2016
Ämnen:
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC4813964/
https://ncbi.nlm.nih.gov/pubmed/26999157
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16030389
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