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The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor
A piezoresistive pressure sensor with a beam-membrane-dual-island structure is developed for micro-pressure monitoring in the field of aviation, which requires great sensitivity and overload resistance capacity. The design, fabrication, and test of the sensor are presented in this paper. By analyzin...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4813923/ https://ncbi.nlm.nih.gov/pubmed/27005627 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16030348 |
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