A carregar...
Top-Down Nanofabrication and Characterization of 20 nm Silicon Nanowires for Biosensing Applications
A top-down nanofabrication approach is used to develop silicon nanowires from silicon-on-insulator (SOI) wafers and involves direct-write electron beam lithography (EBL), inductively coupled plasma-reactive ion etching (ICP-RIE) and a size reduction process. To achieve nanometer scale size, the cruc...
Na minha lista:
| Publicado no: | PLoS One |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Public Library of Science
2016
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4811568/ https://ncbi.nlm.nih.gov/pubmed/27022732 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1371/journal.pone.0152318 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|