High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography

[Image: see text] We combine atomic layer lithography and glancing-angle ion polishing to create wafer-scale metamaterials composed of dense arrays of ultrasmall coaxial nanocavities in gold films. This new fabrication scheme makes it possible to shrink the diameter and increase the packing density...

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Detalhes bibliográficos
Publicado no:Nano Lett
Main Authors: Yoo, Daehan, Nguyen, Ngoc-Cuong, Martin-Moreno, Luis, Mohr, Daniel A., Carretero-Palacios, Sol, Shaver, Jonah, Peraire, Jaime, Ebbesen, Thomas W., Oh, Sang-Hyun
Formato: Artigo
Idioma:Inglês
Publicado em: American Chemical Society 2016
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4789754/
https://ncbi.nlm.nih.gov/pubmed/26910363
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.nanolett.6b00024
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