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Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine
The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the rea...
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| Опубликовано в: : | Nanoscale Res Lett |
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| Главные авторы: | , , , |
| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
Springer US
2016
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| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4783314/ https://ncbi.nlm.nih.gov/pubmed/26956598 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1341-9 |
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