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Controllable electrical and physical breakdown of poly-crystalline silicon nanowires by thermally assisted electromigration
The importance of poly-crystalline silicon (poly-Si) in semiconductor manufacturing is rapidly increasing due to its highly controllable conductivity and excellent, uniform deposition quality. With the continuing miniaturization of electronic components, low dimensional structures such as 1-dimensio...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4726027/ https://ncbi.nlm.nih.gov/pubmed/26782708 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep19314 |
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