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Resonating Behaviour of Nanomachined Holed Microcantilevers
The nanofabrication of a nanomachined holed structure localized on the free end of a microcantilever is here presented, as a new tool to design micro-resonators with enhanced mass sensitivity. The proposed method allows both for the reduction of the sensor oscillating mass and the increment of the r...
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| Publicado en: | Sci Rep |
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| Autores principales: | , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Nature Publishing Group
2015
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4672296/ https://ncbi.nlm.nih.gov/pubmed/26643936 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep17837 |
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