RM 8111: Development of a Prototype Linewidth Standard

Staffs of the Semiconductor Electronics Division, the Information Technology Laboratory, and the Precision Engineering Laboratory at NIST, have developed a new generation of prototype Single-Crystal CD (Critical Dimension) Reference (SCCDRM) Materials with the designation RM 8111. Their intended use...

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Detalhes bibliográficos
Publicado no:J Res Natl Inst Stand Technol
Main Authors: Cresswell, Michael W., Guthrie, William F., Dixson, Ronald G., Allen, Richard A., Murabito, Christine E., Martinez De Pinillos, J. V.
Formato: Artigo
Idioma:Inglês
Publicado em: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2006
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4659447/
https://ncbi.nlm.nih.gov/pubmed/27274928
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.111.016
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