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Vertically Conductive Single-Crystal SiC-Based Bragg Reflector Grown on Si Wafer
Single-crystal silicon carbide (SiC) thin-films on silicon (Si) were used for the fabrication and characterization of electrically conductive distributed Bragg reflectors (DBRs) on 100 mm Si wafers. The DBRs, each composed of 3 alternating layers of SiC and Al(Ga)N grown on Si substrates, show high...
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| Publicat a: | Sci Rep |
|---|---|
| Autors principals: | , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group
2015
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4658498/ https://ncbi.nlm.nih.gov/pubmed/26601894 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep17026 |
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