Continuum models of focused electron beam induced processing

Focused electron beam induced processing (FEBIP) is a suite of direct-write, high resolution techniques that enable fabrication and editing of nanostructured materials inside scanning electron microscopes and other focused electron beam (FEB) systems. Here we detail continuum techniques that are use...

Täydet tiedot

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Bibliografiset tiedot
Julkaisussa:Beilstein J Nanotechnol
Päätekijät: Toth, Milos, Lobo, Charlene, Friedli, Vinzenz, Szkudlarek, Aleksandra, Utke, Ivo
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: Beilstein-Institut 2015
Aiheet:
Review
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC4578401/
https://ncbi.nlm.nih.gov/pubmed/26425405
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.6.157
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