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Design Procedure and Fabrication of Reproducible Silicon Vernier Devices for High-Performance Refractive Index Sensing

In this paper, we propose a generalized procedure for the design of integrated Vernier devices for high performance chemical and biochemical sensing. In particular, we demonstrate the accurate control of the most critical design and fabrication parameters of silicon-on-insulator cascade-coupled race...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Troia, Benedetto, Khokhar, Ali Z., Nedeljkovic, Milos, Reynolds, Scott A., Hu, Youfang, Mashanovich, Goran Z., Passaro, Vittorio M. N.
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4507709/
https://ncbi.nlm.nih.gov/pubmed/26067193
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150613548
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