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Two-dimensional in situ metrology of X-ray mirrors using the speckle scanning technique
In situ metrology overcomes many of the limitations of existing metrology techniques and is capable of exceeding the performance of present-day optics. A novel technique for precisely characterizing an X-ray bimorph mirror and deducing its two-dimensional (2D) slope error map is presented. This tech...
Gardado en:
| Publicado en: | J Synchrotron Radiat |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
International Union of Crystallography
2015
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4489535/ https://ncbi.nlm.nih.gov/pubmed/26134795 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S1600577515006657 |
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