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MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge
A thermal flow transduction method combining the advantages of calorimetric and hot-film transduction principles is developed and analyzed by Finite Element Method (FEM) simulations and confirmed experimentally. The analyses include electrothermal feedback effects of current driven NTC thermistors....
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4481909/ https://ncbi.nlm.nih.gov/pubmed/25928062 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150510004 |
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