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FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout
This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6720222/ https://ncbi.nlm.nih.gov/pubmed/31443277 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19163561 |
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