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A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications
This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer r...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2015
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4435218/ https://ncbi.nlm.nih.gov/pubmed/25806868 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150306872 |
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