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A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications
This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer r...
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| 主要な著者: | , , , , , |
|---|---|
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI AG
2015-03-01
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| シリーズ: | Sensors |
| 主題: | |
| オンライン･アクセス: | http://www.mdpi.com/1424-8220/15/3/6872 |
| タグ: |
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