A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications

This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer r...

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Bibliografski detalji
Glavni autori: Fangming Deng, Yigang He, Bing Li, Lei Zuo, Xiang Wu, Zhihui Fu
Format: Artigo
Jezik:Inglês
Izdano: MDPI AG 2015-03-01
Serija:Sensors
Teme:
pressure sensor
RFID technology
CMOS process
capacitive sensor interface
rectifier
Online pristup:http://www.mdpi.com/1424-8220/15/3/6872
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