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Development of low-fluorescence thick photoresist for high-aspect-ratio microstructure in bio-application
In this study, we propose and evaluate a novel low-auto-fluorescence photoresist (SJI photoresist) for bio-application, e.g., in gene analysis and cell assay. The spin-coated SJI photoresist has a wide thickness range of ten to several hundred micrometers, and photoresist microstructures with an asp...
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| Publicado en: | Biomicrofluidics |
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| Autores principales: | , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
AIP Publishing LLC
2015
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4401797/ https://ncbi.nlm.nih.gov/pubmed/25945132 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4917511 |
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