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Development of low-fluorescence thick photoresist for high-aspect-ratio microstructure in bio-application

In this study, we propose and evaluate a novel low-auto-fluorescence photoresist (SJI photoresist) for bio-application, e.g., in gene analysis and cell assay. The spin-coated SJI photoresist has a wide thickness range of ten to several hundred micrometers, and photoresist microstructures with an asp...

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Detalles Bibliográficos
Publicado en:Biomicrofluidics
Autores principales: Tamai, H., Maruo, K., Ueno, H., Terao, K., Kotera, H., Suzuki, T.
Formato: Artigo
Lenguaje:Inglês
Publicado: AIP Publishing LLC 2015
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Acceso en línea:https://ncbi.nlm.nih.gov/pmc/articles/PMC4401797/
https://ncbi.nlm.nih.gov/pubmed/25945132
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4917511
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