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A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT
This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4367319/ https://ncbi.nlm.nih.gov/pubmed/25625905 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150202538 |
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