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Maskless milling of diamond by a focused oxygen ion beam
Recent advances in focused ion beam technology have enabled high-resolution, maskless nanofabrication using light ions. Studies with light ions to date have, however, focused on milling of materials where sub-surface ion beam damage does not inhibit device performance. Here we report on maskless mil...
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| 出版年: | Sci Rep |
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| 主要な著者: | , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Nature Publishing Group
2015
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4354013/ https://ncbi.nlm.nih.gov/pubmed/25753406 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep08958 |
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