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Maskless milling of diamond by a focused oxygen ion beam

Recent advances in focused ion beam technology have enabled high-resolution, maskless nanofabrication using light ions. Studies with light ions to date have, however, focused on milling of materials where sub-surface ion beam damage does not inhibit device performance. Here we report on maskless mil...

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Dettagli Bibliografici
Pubblicato in:Sci Rep
Autori principali: Martin, Aiden A., Randolph, Steven, Botman, Aurelien, Toth, Milos, Aharonovich, Igor
Natura: Artigo
Lingua:Inglês
Pubblicazione: Nature Publishing Group 2015
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC4354013/
https://ncbi.nlm.nih.gov/pubmed/25753406
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep08958
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