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Coherent X-Ray Diffraction Imaging and Characterization of Strain in Silicon-on-Insulator Nanostructures

Coherent X-ray diffraction imaging (CDI) has emerged in the last decade as a promising high resolution lens-less imaging approach for the characterization of various samples. It has made significant technical progress through developments in source, algorithm and imaging methodologies thus enabling...

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Bibliografiske detaljer
Udgivet i:Adv Mater
Main Authors: Xiong, Gang, Moutanabbir, Oussama, Reiche, Manfred, Harder, Ross, Robinson, Ian
Format: Artigo
Sprog:Inglês
Udgivet: BlackWell Publishing Ltd 2014
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4282757/
https://ncbi.nlm.nih.gov/pubmed/24955950
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/adma.201304511
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